ENERGY ANALYSIS OF HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO AND BATIO3

被引：88

作者：

TOMINAGA, K

IWAMURA, S

SHINTANI, Y

TADA, O

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 05期

关键词：

D O I：

10.1143/JJAP.21.688

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：688 / 695

页数：8

共 9 条

[1] PRODUCTION OF HIGH-ENERGY NEUTRAL ATOMS BY SCATTERING OF IONS AT SOLID SURFACES AND ITS RELATION TO SPUTTERING [J].

BRODIE, I ;

LAMONT, LT ;

JEPSEN, RL .

PHYSICAL REVIEW LETTERS, 1968, 21 (17) :1224-&

[2]

CUOMO JJ, 1977, IBM J RES DEV, V21, P580, DOI 10.1147/rd.216.0580

[3] SIGNIFICANCE OF NEGATIVE-ION FORMATION IN SPUTTERING AND SIMS ANALYSIS [J].

CUOMO, JJ ;

GAMBINO, RJ ;

HARPER, JME ;

KUPTSIS, JD ;

WEBBER, JC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :281-287

[4]

ICHIMURA M, 1980, 1980 P INT C PLASM P, P350

[5] SECONDARY-ELECTRON EJECTION FROM CONTAMINATED METAL-SURFACE BY HE AND AR ATOMS [J].

KADOTA, K ;

KANEKO, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (10) :1554-1561

[6]

KAMINSKY M, 1965, ATOMIC IONIC IMPACT, pCH12

[7] BEHAVIORS OF HIGH-ENERGY ELECTRONS AND NEUTRAL ATOMS IN SPUTTERING OF BATIO3 [J].

SHINTANI, Y ;

NAKANISHI, K ;

TAKAWAKI, T ;

TADA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1975, 14 (12) :1875-1879

[8] HIGH-ENERGY NEUTRAL ATOMS IN THE SPUTTERING OF ZNO [J].

TOMINAGA, K ;

UESHIBA, N ;

SHINTANI, Y ;

TADA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (03) :519-526

[9]

VOSS DE, 1980, PPPL1664 PRINC U PLA

← 1 →