PROTON NMR-STUDIES OF ANNEALED PLASMA-DEPOSITED AMORPHOUS SI-H FILMS

被引:72
作者
REIMER, JA [1 ]
VAUGHAN, RW [1 ]
KNIGHTS, JC [1 ]
机构
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
关键词
D O I
10.1016/0038-1098(81)90734-1
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
收藏
页码:161 / 164
页数:4
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