IONIC SPECIES IN A SILANE PLASMA

被引：76
作者：
HALLER, I
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 03期
关键词：
D O I：
10.1063/1.91907
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：282 / 284
页数：3
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