ANALYSIS OF A QUARTZ CRYSTAL MICROBALANCE WITH COATINGS OF FINITE VISCOSITY

被引：42

作者：

CRANE, RA ^{[1
]}

FISCHER, G ^{[1
]}

机构：

[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,LANCASHIRE,ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1979年 / 12卷 / 12期

关键词：

D O I：

10.1088/0022-3727/12/12/005

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Presented is an experimental investigation and a theoretical analysis of the behaviour of a quartz crystal microbalance with coatings of varying viscosity and modulus of elasticity. The analysis is based upon the analogy with electrical waves propagating in a lossy transmission line.

引用

页码：2019 / 2026

页数：8

共 12 条

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[5] ACOUSTIC WAVE ANALYSIS OF OPERATION OF QUARTZ-CRYSTAL FILM-THICKNESS MONITORS
MILLER, JG
BOLEF, DI
[J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) : 5815 - &
[6] POOLE NJ, 1977, THESIS U SALFORD
[7] PROGRESS IN MONITORING THIN-FILM THICKNESS WITH QUARTZ CRYSTAL RESONATORS
PULKER, HK
BENES, E
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[J]. THIN SOLID FILMS, 1976, 32 (01) : 27 - 33
[8] RAYLEIGH, 1945, THEORY SOUND, V1
[9] RUTTLE SGR, 1975, THESIS TRINITY COLLE
[10] Stockbridge CD, 1966, VACUUM MICROBALANCE, V5, P193

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