THE INITIAL-STAGES OF PLASMA SYNTHESIS OF DIAMOND FILMS

被引：0
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作者：
MEILUNAS, R
WONG, MS
SHENG, K
ONG, TP
CHANG, RPH
机构：
来源：
LASER- AND PARTICLE-BEAM CHEMICAL PROCESSES ON SURFACES | 1989年 / 129卷
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中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
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页码：533 / 538
页数：6
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