TECHNICAL NOTE - A MAGNETRON SPUTTER ION-PLATING SYSTEM

被引:51
作者
TEER, DG [1 ]
机构
[1] DG TEER COATING SERV LTD,285 HARTLEBURY TRADING ESTATE,HARTLEBURY DY10 4JB,WORCS,ENGLAND
关键词
D O I
10.1016/S0257-8972(89)80017-9
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:565 / 572
页数:8
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