RESONATING SILICON BEAM FORCE SENSOR

被引：20

作者：

BLOM, FR

BOUWSTRA, S

FLUITMAN, JHJ

ELWENSPOEK, M

机构：

来源：

SENSORS AND ACTUATORS | 1989年 / 17卷 / 3-4期

关键词：

D O I：

10.1016/0250-6874(89)80039-3

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：513 / 519

页数：7

共 7 条

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ERDEM, U .

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[2]

KIRMAN RG, 1983, JUN P TRANSD TEMPC C, P97

[3]

Nisse E. P. E., 1980, U.S. Patent, Patent No. [4 215 570 A, 4215570]

[4]

SMITS JG, 1985, 3RD P INT C SOL STAT, P93

[5]

TIMOSHENKO S, 1974, VIBRATION PROBLEMS E, P408

[6]

Ueda T., 1984, Recent Advances in Weighing Technology and Force Measurement. 10th International Conference of the IMEKO Technical Committee TC-3 on Measurement of Force and Mass (Preprints received), P17

[7] PRECISE MEASUREMENT OF SMALL FORCES [J].

ZULLIGER, HR .

SENSORS AND ACTUATORS, 1983, 4 (04) :483-495

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