STABILITY OF AS-DOPED AND B-DOPED SI WITH RESPECT TO OVERLAYING COSI2 AND TISI2 THIN-FILMS

被引：61
作者：
MAEX, K
GHOSH, G
DELAEY, L
PROBST, V
LIPPENS, P
VANDENHOVE, L
DEKEERSMAECKER, RE
机构：
[1] CATHOLIC UNIV LEUVEN,DEPT MET & MAT ENGN,B-3030 HEVERLE,BELGIUM
[2] SIEMENS AG,CORP RES & DEV,D-8000 MUNICH 83,FED REP GER
来源：
JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 05期
关键词：
D O I：
10.1557/JMR.1989.1209
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1209 / 1217
页数：9
相关论文
共 36 条
[1]  
Barin I., 2013, THERMOCHEMICAL PROPE
[2]  
BELOUSOV UI, 1979, J PHYS CHEM-US, V53, P1266
[3]   TITANIUM DISILICIDE FORMATION ON HEAVILY DOPED SILICON SUBSTRATES [J].
BEYERS, R ;
COULMAN, D ;
MERCHANT, P .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (11) :5110-5117
[4]   PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J].
BEYERS, R ;
SINCLAIR, R ;
THOMAS, ME .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :781-784
[5]   PHASE-EQUILIBRIA IN METAL-GALLIUM-ARSENIC SYSTEMS - THERMODYNAMIC CONSIDERATIONS FOR METALLIZATION MATERIALS [J].
BEYERS, R ;
KIM, KB ;
SINCLAIR, R .
JOURNAL OF APPLIED PHYSICS, 1987, 61 (06) :2195-2202
[6]   HEAT OF MIXING OF LIQUID ALLOYS .1. [J].
BOOM, R ;
BOER, FRD ;
MIEDEMA, AR .
JOURNAL OF THE LESS-COMMON METALS, 1976, 45 (02) :237-245
[7]   HEAT OF MIXING OF LIQUID ALLOYS .2. [J].
BOOM, R ;
DEBOER, FR ;
MIEDEMA, AR .
JOURNAL OF THE LESS-COMMON METALS, 1976, 46 (02) :271-284
[8]   TITANIUM SILICIDE FORMATION ON BORON-IMPLANTED SILICON [J].
CHOW, TP ;
KATZ, W ;
GOEHNER, R ;
SMITH, G .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (08) :1914-1918
[9]  
DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517
[10]  
DIRCKX RR, 1987, CALPHAD, V11, P167
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