THE DIFFUSION OF SILICON IN GERMANIUM

被引:69
作者
RAISANEN, J
HIRVONEN, J
ANTTILA, A
机构
关键词
D O I
10.1016/0038-1101(81)90027-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:333 / 336
页数:4
相关论文
共 17 条
[11]   DIFFUSION OF GERMANIUM IN SILICON [J].
MCVAY, GL ;
DUCHARME, AR .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (03) :1409-1410
[12]   SELF DIFFUSION IN INTRINSIC SILICON [J].
PEART, RF .
PHYSICA STATUS SOLIDI, 1966, 15 (02) :K119-&
[13]  
PETROV DA, 1957, VOPROSY MET FIZ POLU, P130
[14]   APPLICATION OF LOOP ANNEALING TECHNIQUE TO SELF-DIFFUSION STUDIES IN SILICON [J].
SANDERS, IR ;
DOBSON, PS .
JOURNAL OF MATERIALS SCIENCE, 1974, 9 (12) :1987-1993
[15]  
SEEGER A, 1968, PHYS STAT SOLIDI, V29, P4551
[16]  
VALENTA MW, 1956, PHYS REV, V106, P73
[17]  
Widmer H., 1961, HELV PHYS ACTA, V34, P635