A STUDY OF CONTAMINATION AND DAMAGE ON SI SURFACES INDUCED BY DRY ETCHING

被引：26

作者：

MOGHADAM, FK

MU, XC

机构：

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1989年 / 36卷 / 09期

关键词：

D O I：

10.1109/16.34219

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1602 / 1609

页数：8

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