STRAIN-MEASUREMENTS AND THERMAL-STABILITY OF SI1-XGEX/SI STRAINED LAYERS

被引：20
|
作者：
HOLLANDER, B
MANTL, S
STRITZKER, B
JORKE, H
KASPER, E
机构：
[1] FORSCHUNGSZENTRUM JULICH, INST FESTKORPERFORSCH, D-5170 JULICH 1, FED REP GER
[2] AEG TELEFUNKEN, FORSCHUNGSINST, D-7900 ULM, FED REP GER
来源：
JOURNAL OF MATERIALS RESEARCH | 1989年 / 4卷 / 01期
关键词：
D O I：
10.1557/JMR.1989.0163
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：163 / 166
页数：4
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