SUPERHARD AND ELASTIC CARBON NITRIDE THIN-FILMS HAVING FULLERENE-LIKE MICROSTRUCTURE

被引：659
作者：
SJOSTROM, H
STAFSTROM, S
BOMAN, M
SUNDGREN, JE
机构：
[1] Department of Physics, Linköping University
来源：
PHYSICAL REVIEW LETTERS | 1995年 / 75卷 / 07期
关键词：
D O I：
10.1103/PhysRevLett.75.1336
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
CNx films were found to have a distorted graphitelike microstructure consisting of buckled and curved basal planes using high-resolution electron microscopy. Nanoindentation showed an elastic recovery of 85%, and a hardness of similar to 60 GPa. Based on detailed quantum chemical calculations and photoelectron spectroscopy, the observed structure is proposed to consist of a network of buckled sp(2)-hybridized CNx planes, cross-linked by sp(3)-hybridized bonds. The buckling is shown to be due to the incorporation of pentagons in the basal planes, giving rise to a fullerenelike microstructure.
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页码：1336 / 1339
页数：4
相关论文
共 24 条
[11]   THEORETICAL-STUDY OF A HYPOTHETICAL METALLIC PHASE OF CARBON [J].
LIU, AY ;
COHEN, ML .
PHYSICAL REVIEW B, 1992, 45 (09) :4579-4581
[12]   STRUCTURAL-PROPERTIES AND ELECTRONIC-STRUCTURE OF LOW-COMPRESSIBILITY MATERIALS - BETA-SI3N4 AND HYPOTHETICAL BETA-C3N4 [J].
LIU, AY ;
COHEN, ML .
PHYSICAL REVIEW B, 1990, 41 (15) :10727-10734
[13]  
Loubet J. L., 1986, MICROINDENTATION TEC, P72, DOI DOI 10.1520/STP32952S
[14]   IMPROVED TEM SAMPLES OF SEMICONDUCTORS PREPARED BY A SMALL-ANGLE CLEAVAGE TECHNIQUE [J].
MCCAFFREY, JP .
MICROSCOPY RESEARCH AND TECHNIQUE, 1993, 24 (02) :180-184
[15]   EXPERIMENTAL REALIZATION OF THE COVALENT SOLID CARBON NITRIDE [J].
NIU, CM ;
LU, YZ ;
LIEBER, CM .
SCIENCE, 1993, 261 (5119) :334-337
[16]   AN IMPROVED TECHNIQUE FOR DETERMINING HARDNESS AND ELASTIC-MODULUS USING LOAD AND DISPLACEMENT SENSING INDENTATION EXPERIMENTS [J].
OLIVER, WC ;
PHARR, GM .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1564-1583
[17]   IS C60 STIFFER THAN DIAMOND [J].
RUOFF, RS ;
RUOFF, AL .
NATURE, 1991, 350 (6320) :663-664
[18]   REACTIVE MAGNETRON SPUTTER-DEPOSITION OF CNX FILMS ON SI(001) SUBSTRATES - FILM GROWTH, MICROSTRUCTURE AND MECHANICAL-PROPERTIES [J].
SJOSTROM, H ;
IVANOV, I ;
JOHANSSON, M ;
HULTMAN, L ;
SUNDGREN, JE ;
HAINSWORTH, SV ;
PAGE, TF ;
WALLENBERG, LR .
THIN SOLID FILMS, 1994, 246 (1-2) :103-109
[19]  
SJOSTROM H, IN PRESS
[20]  
SMITH R, IN PRESS VACUUM
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