PREPARATION AND PROPERTIES OF ALUMINUM NITRIDE FILMS USING AN ORGANOMETALLIC PRECURSOR

被引：114

作者：

INTERRANTE, LV ^{[1
]}

LEE, W ^{[1
]}

MCCONNELL, M ^{[1
]}

LEWIS, N ^{[1
]}

HALL, E ^{[1
]}

机构：

[1] GE,CORP RES & DEV,MAT CHARACTERIZAT & ENGN SUPPORT OPERAT,SCHENECTADY,NY 12301

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 02期

关键词：

D O I：

10.1149/1.2096657

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：472 / 478

页数：7

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