CHEMICAL VAPOR-DEPOSITION AND CHARACTERIZATION OF ZRO2 FILMS FROM ORGANOMETALLIC COMPOUNDS

被引：129

作者：

BALOG, M

SCHIEBER, M

MICHMAN, M

PATAI, S

机构：

[1] HEBREW UNIV JERUSALEM,SCH APPL SCI & TECHNOL,DEPT MAT SCI,JERUSALEM 91000,ISRAEL

[2] HEBREW UNIV JERUSALEM,DEPT ORGAN CHEM,JERUSALEM 91000,ISRAEL

来源：

THIN SOLID FILMS | 1977年 / 47卷 / 02期

关键词：

D O I：

10.1016/0040-6090(77)90350-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：109 / 120

页数：12

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[7] HEXAFLUOROACETYLACETONATES OF ZIRCONIUM AND HAFNIUM [J].

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MAZDIYASNI, KS .

INORGANIC CHEMISTRY, 1968, 7 (12) :2501-+

[8]

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[9] INFRA-RED ABSORPTION IN SEMICONDUCTORS [J].

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