ANOMALOUS RESISTIVITY CHANGE IN B DOPED POLYCRYSTALLINE SI CAUSED BY BN FORMATION UNDER N2 HEAT-TREATMENT

被引：3
|
作者：
MAKINO, T [1 ]
NAKAMURA, H [1 ]
机构：
[1] NIPPON TELEG & TEL PUBL CORP,MUSASHINO ELECT COMMUN LAB,MUSASHINO,TOKYO 180,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1977年 / 16卷 / 10期
关键词：
D O I：
10.1143/JJAP.16.1757
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1757 / 1764
页数：8
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