HIGH SENSITIVITY AUGER ELECTRON SPECTROMETER

被引：194
作者：
PALMBERG, PW
BOHN, GK
TRACY, JC
机构：
来源：
APPLIED PHYSICS LETTERS | 1969年 / 15卷 / 08期
关键词：
D O I：
10.1063/1.1652989
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An Auger electron spectrometer for studies of solid surfaces which is considerably more sensitive than currently used instruments has been developed. The greatly improved signal-to-noise ratio of the spectrometer made it possible to display the 0-1000 eV Auger spectrum on an oscilloscope at a scanning rate of 20 000 V/sec. Alternatively, the scanning rate may be reduced to that typical of present instruments (∼2 V/sec) and the primary beam current reduced from 5 × 10-5 to 10-8 A. © 1969 The American Institute of Physics.
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页码：254 / &
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