HIGH SENSITIVITY AUGER ELECTRON SPECTROMETER

被引：194

作者：

PALMBERG, PW

BOHN, GK

TRACY, JC

机构：

来源：

APPLIED PHYSICS LETTERS | 1969年 / 15卷 / 08期

关键词：

D O I：

10.1063/1.1652989

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An Auger electron spectrometer for studies of solid surfaces which is considerably more sensitive than currently used instruments has been developed. The greatly improved signal-to-noise ratio of the spectrometer made it possible to display the 0-1000 eV Auger spectrum on an oscilloscope at a scanning rate of 20 000 V/sec. Alternatively, the scanning rate may be reduced to that typical of present instruments (∼2 V/sec) and the primary beam current reduced from 5 × 10-5 to 10-8 A. © 1969 The American Institute of Physics.

引用

页码：254 / &

共 50 条

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