APPLICATION OF THE ION BOMBARDMENT CLEANING METHOD TO TITANIUM, GERMANIUM, SILICON, AND NICKEL AS DETERMINED BY LOW-ENERGY ELECTRON DIFFRACTION

被引:197
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FARNSWORTH, HE
SCHLIER, RE
GEORGE, TH
BURGER, RM
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10.1063/1.1723393
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O59 [应用物理学];
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页码:1150 / 1161
页数:12
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