PROPERTIES OF DC MAGNETRON-SPUTTERED LEAD ZIRCONATE TITANATE THIN-FILMS

被引：84
|
作者：
SREENIVAS, K
SAYER, M
GARRETT, P
机构：
来源：
THIN SOLID FILMS | 1989年 / 172卷 / 02期
关键词：
D O I：
10.1016/0040-6090(89)90653-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：251 / 267
页数：17
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