CHEMICAL VAPOR-DEPOSITION APPLICATIONS IN MICROELECTRONICS PROCESSING

被引：17

作者：

BEAN, KE

机构：

来源：

THIN SOLID FILMS | 1981年 / 83卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90663-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：173 / 186

页数：14

共 26 条

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