SI DEPOSITION RATES IN A 2-DIMENSIONAL CVD REACTOR AND COMPARISONS WITH MODEL-CALCULATIONS

Deposition rates are presented for silicon from silane in a helium carrier gas using a tubular CVD reactor with a two-dimensional flow geometry. Measured surface-temperature profiles, inlet gas velocities, total pressures, and silane/helium concentrations are reported, providing exact boundary conditions that can be used in a two-dimensional numerical CVD model. Comparisons are made between this data and two variations of a model by Coltrin, Kee, and Miller in which different empirical expressions for the silane and disilane reactive sticking coefficient are used. © 1990, The Electrochemical Society, Inc. All rights reserved.