THE EQUILIBRATION BEHAVIOR OF DEFECTS IN BORON DOPED HYDROGENATED AMORPHOUS SILICON-CARBON FILMS DURING THE ANNEALING PROCESS

被引:0
|
作者
SONG, ZZ
ZHANG, FQ
ZHAO, LM
GUO, YP
CHEN, GH
机构
[1] Department of Physics, Lanzhou University
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1991年 / 126卷 / 02期
关键词
D O I
10.1002/pssa.2211260229
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
引用
收藏
页码:K99 / K103
页数:5
相关论文
共 50 条
  • [31] TRIBOLOGICAL BEHAVIOR OF AMORPHOUS HYDROGENATED CARBON-FILMS ON SILICON
    GANGOPADHYAY, AK
    VASSELL, WC
    TAMOR, MA
    WILLERMET, PA
    JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME, 1994, 116 (03): : 454 - 462
  • [32] Raman spectroscopic investigation of boron doped hydrogenated amorphous silicon thin films
    Shrestha, K.
    Lopes, V. C.
    Syllaios, A. J.
    Littler, C. L.
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2014, 403 : 80 - 83
  • [33] ANNEALING OF METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    STUTZMANN, M
    JACKSON, WB
    TSAI, CC
    PHYSICAL REVIEW B, 1986, 34 (01): : 63 - 72
  • [34] Femtosecond Laser Crystallization of Boron-doped Amorphous Hydrogenated Silicon Films
    Rybalko, P. D.
    Khenkin, M. V.
    Forsh, P. A.
    Drevinskas, R.
    Matsukatova, A. N.
    Kazansky, P.
    Kazanskii, A. G.
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2016, 8 (03)
  • [35] OPTICAL-CONSTANTS AND MICROSTRUCTURE OF AMORPHOUS HYDROGENATED SILICON-CARBON ALLOY-FILMS
    MUI, K
    BASA, DK
    CORDERMAN, R
    SMITH, FW
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 999 - 1002
  • [36] Characterization of hydrogenated amorphous silicon-carbon films deposited by hybrid-plasma CVD
    Fujii, Tadashi
    Sameshima, Kenji
    Okada, Hiroshi
    Yoshida, Kenji
    Hashimoto, Tadao
    Yoshimoto, Masahiro
    Fuyuki, Takashi
    Matsunami, Hiroyuki
    1600, Elsevier Science Publishers B.V., Amsterdam, Netherlands (34):
  • [37] THERMAL EQUILIBRATION IN HYDROGENATED AMORPHOUS SILICON-BASED FILMS
    SHIMIZU, T
    XU, XX
    SASAKI, H
    MORIMOTO, A
    KUMEDA, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 648 - 650
  • [38] CHARACTERISTICS OF ELECTRON-SPIN RESONANCE IN HYDROGENATED AMORPHOUS SILICON-CARBON HYDROGENATED AMORPHOUS-SILICON HETEROJUNCTIONS
    CHEN, GG
    SUN, GS
    ZHANG, FQ
    APPLIED PHYSICS LETTERS, 1989, 54 (09) : 807 - 809
  • [39] ELECTRO-LUMINESCENCE IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY
    MUNEKATA, H
    KUKIMOTO, H
    APPLIED PHYSICS LETTERS, 1983, 42 (05) : 432 - 434
  • [40] Microstructural characterization of hard hydrogenated amorphous silicon-carbon alloys
    Camargo, SS
    Beyer, W
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2002, 299 : 885 - 890