THE EQUILIBRATION BEHAVIOR OF DEFECTS IN BORON DOPED HYDROGENATED AMORPHOUS SILICON-CARBON FILMS DURING THE ANNEALING PROCESS

被引：0
|
作者：
SONG, ZZ
ZHANG, FQ
ZHAO, LM
GUO, YP
CHEN, GH
机构：
[1] Department of Physics, Lanzhou University
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1991年 / 126卷 / 02期
关键词：
D O I：
10.1002/pssa.2211260229
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：K99 / K103
页数：5
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