HYDROGEN AND AMMONIA RESPONSE OF METAL-SILICON DIOXIDE-SILICON STRUCTURES WITH THIN PLATINUM GATES

被引：101

作者：

SPETZ, A

ARMGARTH, M

LUNDSTROM, I

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 03期

关键词：

D O I：

10.1063/1.341846

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1274 / 1283

页数：10

共 36 条

[1]

ACKELID U, UNPUB

[2] HYDROGEN SPILLOVER EFFECTS IN THE HYDROGENATION OF BENZENE OVER PT/GAMMA-AL2O3 CATALYSTS [J].

ANTONUCCI, P ;

VANTRUONG, N ;

GIORDANO, N ;

MAGGIORE, R .

JOURNAL OF CATALYSIS, 1982, 75 (01) :140-150

[3] HYDROGEN-INDUCED OXIDE SURFACE CHARGING IN PALLADIUM-GATE METAL-OXIDE-SEMICONDUCTOR DEVICES [J].

ARMGARTH, M ;

NYLANDER, C ;

SVENSSON, C ;

LUNDSTROM, I .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) :2956-2963

[4] PALLADIUM AND PLATINUM GATE METAL-OXIDE-SEMICONDUCTOR CAPACITORS IN HYDROGEN AND OXYGEN MIXTURES [J].

ARMGARTH, M ;

SODERBERG, D ;

LUNDSTROM, I .

APPLIED PHYSICS LETTERS, 1982, 41 (07) :654-655

[5]

ARMGARTH M, 1985, 1985 INT C SOL STAT, P235

[6]

BAETZOLD RC, 1984, APPL SURF SCI, V19, P135, DOI 10.1016/0378-5963(84)90057-6

[7] HYDROGENATION OF ETHYLENE ON ALUMINA AFTER HYDROGEN SPILLOVER [J].

BIANCHI, D ;

GARDES, GEE ;

PAJONK, GM ;

TEICHNER, SJ .

JOURNAL OF CATALYSIS, 1975, 38 (1-3) :135-146

[8] FIELD-EFFECT TRANSISTOR SENSITIVE TO DIPOLAR MOLECULES [J].

BLACKBURN, GF ;

LEVY, M ;

JANATA, J .

APPLIED PHYSICS LETTERS, 1983, 43 (07) :700-701

[9]

CHOI SY, 1984, IEEE ELECTR DEVICE L, V5, P14, DOI 10.1109/EDL.1984.25814

[10] PERFORMANCE OF GAS-SENSITIVE PD-GATE MOSFETS WITH SIO2 AND SI3N4 GATE INSULATORS [J].

DOBOS, K ;

STROTMAN, R ;

ZIMMER, G .

SENSORS AND ACTUATORS, 1983, 4 (04) :593-598

← 1 2 3 4 →