WET-CHEMICAL ETCHING OF III-V SEMICONDUCTORS

被引：0
作者：
KELLY, JJ
VANDENMEERAKKER, JEAM
NOTTEN, PHL
TIJBURG, RP
机构：
来源：
PHILIPS TECHNICAL REVIEW | 1988年 / 44卷 / 03期
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：61 / 74
页数：14
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