EXCIMER LASER-INDUCED DEPOSITION OF COPPER-FILMS

被引：3

作者：

BABU, SV ^{[1
]}

PADIYATH, R ^{[1
]}

DAVID, M ^{[1
]}

WALSH, L ^{[1
]}

机构：

[1] ROME AIR DEV CTR,GRIFFISS AFB,NY 13441

来源：

AICHE JOURNAL | 1991年 / 37卷 / 01期

关键词：

D O I：

10.1002/aic.690370115

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

[No abstract available]

引用

页码：150 / 154

页数：5

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[9] DIRECT WRITING OF COPPER FILM PATTERNS BY LASER-INDUCED DECOMPOSITION OF COPPER-ACETATE [J].

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