KINETICS AND MECHANISM OF OXIDATION OF SIGE - DRY VERSUS WET OXIDATION

被引：144
作者：
LEGOUES, FK
ROSENBERG, R
MEYERSON, BS
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 07期
关键词：
D O I：
10.1063/1.100905
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：644 / 646
页数：3
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