NITRIDING OF STAINLESS-STEEL IN AN RF PLASMA

被引：41
作者：
SZASZ, A
FABIAN, DJ
HENDRY, A
SZASZNECSIH, Z
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 66卷 / 11期
关键词：
D O I：
10.1063/1.343664
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：5598 / 5601
页数：4
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