PARTIAL PRESSURE CALIBRATION FOR RESIDUAL GAS ANALYZERS

被引：3

作者：

MORRISON, CF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.1492629

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：79 / &

共 6 条

[1] BARRE R, 1956, VIDE, P25
[2] ULTRAHIGH VACUUM GAUGE CALIBRATION
DAVIS, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1968, 5 (01): : 23 - &
[3] DAVIS WD, 1962, 9TH T NAT VAC S AVS, P363
[4] MEASUREMENTS WITH MODULATED BAYARD-ALPERT GAUGE IN ALUMINOSILICATE GLASS AT PRESSURES BELOW 10-12 TORR
HOBSON, JP
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1964, 1 (01): : 1 - &
[5] REFERENCE-TRANSFER METHOD OF VACUUM-GAUGE CALIBRATION
MORRISON, CF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (05): : 246 - &
[6] VANATTA CM, 1965, VACUUM SCIENCE ENGIN, P227