共 16 条
[4]
BESMANN TM, 1988, 3RD P INT S CER MAT, P443
[5]
BURGESS JN, 1974, CHEM IND-LONDON, P76
[7]
GILING LJ, 1986, J CRYST GROWTH, V70, P309
[9]
ON THE KINETICS OF THE CVD OF SI FROM SIH2CL2/H2 AND SIC FROM CH3SICL3/H2 IN A VERTICAL TUBULAR HOT-WALL REACTOR
[J].
JOURNAL DE PHYSIQUE,
1989, 50 (C-5)
:93-103