MONOLAYER ANALYSIS IN RUTHERFORD BACKSCATTERING SPECTROSCOPY

被引：106
作者：
KIMURA, K
OHSHIMA, K
MANNAMI, M
机构：
[1] Department of Engineering Science, Kyoto University
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 17期
关键词：
D O I：
10.1063/1.111653
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Energy spectra of 300-keV He ions backscattered from single-crystal surfaces are measured with a 90-degrees magnetic spectrometer at grazing exit angles. The ions scattered from successive atomic layers can be resolved as separated peaks in the energy spectra. It is shown that both high energy resolution and the grazing angle technique are essential to the monolayer analysis.
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页码：2232 / 2234
页数：3
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