INVESTIGATIONS OF STRUCTURE OF THIN FLUOROCARBON FILMS BY X-RAY DIFFRACTION AND INFRARED SPECTROSCOPY

被引：26
作者：
GIEGENGACK, H
HINZE, D
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1971年 / 8卷 / 02期
关键词：
D O I：
10.1002/pssa.2210080221
中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：513 / +
页数：1
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