FORMATION OF CHEMICAL COMPOUNDS BY ION-BOMBARDMENT OF THIN TRANSITION-METAL FILMS

被引：59
作者：
BELII, IM
KOMAROV, FF
TISHKOV, VS
YANKOVSKII, VM
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 45卷 / 01期
关键词：
D O I：
10.1002/pssa.2210450140
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：343 / 352
页数：10
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