A COMPARATIVE-STUDY OF THE DIFFUSION BARRIER PROPERTIES OF TIN AND ZRN

被引：89
|
作者：
OSTLING, M
NYGREN, S
PETERSSON, CS
NORSTROM, H
BUCHTA, R
BLOM, HO
BERG, S
机构：
[1] UNIV UPPSALA,INST TECHNOL,S-75121 UPPSALA,SWEDEN
[2] INST MICROWAVE TECHNOL,S-10044 STOCKHOLM,SWEDEN
来源：
THIN SOLID FILMS | 1986年 / 145卷 / 01期
关键词：
D O I：
10.1016/0040-6090(86)90254-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
13
引用
收藏
页码：81 / 88
页数：8
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