DETERMINATION OF ELECTRON-ENERGY DISTRIBUTION-FUNCTIONS IN SURFACE-WAVE PRODUCED PLASMAS .2. MEASUREMENTS

被引：35
作者：
KORTSHAGEN, U
SCHLUTER, H
机构：
[1] Univ of Bochum, Bochum
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1991年 / 24卷 / 09期
关键词：
D O I：
10.1088/0022-3727/24/9/010
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Electron energy distribution functions of surface wave produced argon plasmas are measured via second derivatives of Langmuir probe characteristics. An active compensation method for avoiding modifications by the RF electric field is employed. Good agreement with previous numerical solutions of the Boltzmann equation is observed.
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页码：1585 / 1593
页数：9
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