EXPERIMENTAL-DETERMINATION OF SILICON PRESSURE SENSOR DIAPHRAGM DEFLECTION

被引：10

作者：

DJURIC, Z ^{[1
]}

MATIC, M ^{[1
]}

MATOVIC, J ^{[1
]}

PETROVIC, R ^{[1
]}

SIMICIC, N ^{[1
]}

机构：

[1] UNIV BELGRADE, FAC ELECT ENGN, BELGRADE, YUGOSLAVIA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 24卷 / 03期

关键词：

D O I：

10.1016/0924-4247(90)80053-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.

引用

页码：175 / 179

页数：5

共 13 条

[1] CAPSS - A THIN DIAPHRAGM CAPACITIVE PRESSURE SENSOR SIMULATOR [J].

BIN, TY ;

HUANG, RS .

SENSORS AND ACTUATORS, 1987, 11 (01) :1-22

[2]

CHAN H, 1987, IEEE T ELECTRON DEV, V34, P850

[3] PRESSURE SENSITIVITY IN ANISOTROPICALLY ETCHED THIN-DIAPHRAGM PRESSURE SENSORS [J].

CLARK, SK ;

WISE, KD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) :1887-1896

[4]

Ko W.H., 1985, MICROMACHINING MICRO, P41

[5]

LEE KW, 1982, IEEE T ELECTRON DEV, V29, P34

[6]

PETERSON K, 1987, NOV P IEEE MICR ROB

[7]

Poppinger M., 1986, Solid State Devices 1985. Invited Papers Presented at the 15th European Solid State Device Research Conference, P53

[8] NONLINEAR-ANALYSIS OF A CMOS INTEGRATED SILICON PRESSURE SENSOR [J].

SUZUKI, K ;

ISHIHARA, T ;

HIRATA, M ;

TANIGAWA, H .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (06) :1360-1367

[9]

TIMOSHENKO S, 1959, THEORY PLATES SHELLS, P102

[10] SILICON DIFFUSED-ELEMENT PIEZORESISTIVE DIAPHRAGMS [J].

TUFTE, ON ;

LONG, D ;

CHAPMAN, PW .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (11) :3322-&

← 1 2 →