EXPERIMENTAL-DETERMINATION OF SILICON PRESSURE SENSOR DIAPHRAGM DEFLECTION

被引：10

作者：

DJURIC, Z ^{[1
]}

MATIC, M ^{[1
]}

MATOVIC, J ^{[1
]}

PETROVIC, R ^{[1
]}

SIMICIC, N ^{[1
]}

机构：

[1] UNIV BELGRADE, FAC ELECT ENGN, BELGRADE, YUGOSLAVIA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 24卷 / 03期

关键词：

D O I：

10.1016/0924-4247(90)80053-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses.

引用

页码：175 / 179

页数：5

共 13 条

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