STRUCTURAL AND ELECTRICAL-PROPERTIES OF EPITAXIAL SI ON INSULATING SUBSTRATES

被引:6
作者
ROZGONYI, GA
RADZIMSKI, ZJ
HIGUCHI, T
JIANG, BL
LEE, DM
ZHOU, T
SCHMIDT, D
BLAKE, J
机构
[1] WESTINGHOUSE ELECT CORP,PITTSBURGH,PA 15235
[2] EATON CORP,DIV THIN FILM,DANVERS,MA 01923
关键词
D O I
10.1063/1.101841
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:586 / 588
页数:3
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