EFFECT OF SI+ IMPLANTATION ON THE PROPERTIES OF AMORPHOUS HYDROGENATED SILICON

被引：0
作者：
GOLIKOVA, OA
MAVLYANOV, KY
PETROV, IN
YAFAEV, RR
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来源：
SEMICONDUCTORS | 1995年 / 29卷 / 04期
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中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：299 / 301
页数：3
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