NONEQUILIBRIUM PHENOMENA IN ION-IMPLANTED MOS CAPACITORS

被引:2
作者
BERGER, J [1 ]
机构
[1] HEWLETT PACKARD CO, HEWLETT PACKARD LABS, PALO ALTO, CA 94304 USA
关键词
D O I
10.1063/1.1655027
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:497 / 499
页数:3
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