RF-SPUTTERED CUINSE2 THIN-FILMS

被引：72

作者：

PIEKOSZEWSKI, J ^{[1
]}

LOFERSKI, JJ ^{[1
]}

BEAULIEU, R ^{[1
]}

BEALL, J ^{[1
]}

ROESSLER, B ^{[1
]}

SHEWCHUN, J ^{[1
]}

机构：

[1] BROWN UNIV,DIV ENGN,PROVIDENCE,RI 02912

来源：

SOLAR ENERGY MATERIALS | 1980年 / 2卷 / 03期

关键词：

D O I：

10.1016/0165-1633(80)90012-X

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：363 / 372

页数：10

共 13 条

[1] VARIABLE COMPOSITION THIN-FILMS IN TERNARY CHALCOGENIDE SYSTEMS BY RF COSPUTTERING [J].

BOLKER, BFT ;

SIDLES, PH ;

DANIELSON, GC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :114-116

[2]

BULDHAUPT LF, 1978, D180250981 FIN REP

[3]

DUBOW JB, 1976, APPL PHYS LETT, V29, P495

[4]

FAN JCC, 1975, J ELECTROCHEM SOC, P1724

[5]

FRAZER OB, 1972, J APPL PHYS, V43, P3120

[6]

Kazmerski L. L., 1978, Thirteenth IEEE Photovoltaic Specialists Conference1978, P184

[7]

KAZMERSKI LL, NSFRANNSEAER7519576P

[8] PROPERTIES OF CADMIUM STANNATE FILMS PREPARED BY RF SPUTTERING FROM POWDER TARGETS [J].

LLOYD, P .

THIN SOLID FILMS, 1977, 41 (01) :113-120

[9]

MIZRAH T, 1976, APPL PHYS LETT, V10, P682

[10]

PAMPLIN BR, UNPUBLISHED

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