STATISTICS OF KINETIC SECONDARY-ELECTRON EMISSION DUE TO ION ATOM COLLISIONS IN SOLIDS

Electron emission statistics of ion-induced kinetic secondary electron emission from solids in the energy range 1-40 keV are studied using a Monte Carlo simulation of the transport of the incident ion and recoiling target atoms and a semiempirical model of the kinetic emission. The emission statistics calculated for H+ incident on Au are in good agreement with the experimental data obtained recently by Lakits et al. [Rev. Sci. Instr. 60 (1989) 3151]; they show a larger width of the frequency distribution of emission than that of the Poisson statistics. The simulated calculations not only for H+ on Au but also for noble gas ions (He+, Ne+, Ar+, Kr+ and Xe+) on Mo show that large-angle elastic scattering which causes backscattering of the incident ion and the recoil of the target atoms broadens the distribution.