SINGLE-CRYSTAL SILICON-ON-OXIDE BY A SCANNING CW LASER-INDUCED LATERAL SEEDING PROCESS

被引：70
作者：
LAM, HW
PINIZZOTTO, RF
TASCH, AF
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1981年 / 128卷 / 09期
关键词：
D O I：
10.1149/1.2127779
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1981 / 1986
页数：6
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