SCATTERING OF RAYLEIGH-WAVES BY POST SPACERS

被引:1
作者
WANG, KL
HAUS, HA
机构
[1] MIT,DEPT ELECT ENGN & COMP SCI,CAMBRIDGE,MA 02139
[2] MIT,ELECTR RES LAB,CAMBRIDGE,MA 02139
来源
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1979年 / 26卷 / 01期
关键词
D O I
10.1109/T-SU.1979.31063
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
An analysis is presented of the scattering of surface acoustic waves (SAW) by posts serving as spacers between a substrate supporting a Rayleigh wave and a (semiconductor) superstrate. The superstrate with Rayleigh velocity considerably larger than that of the substrate is modeled as a spring-like load on the post. Radiation patterns for the Power scattered into Rayleigh waves and bulk waves are shown. Scattering of surface acoustic waves is studied as a function of the material parameters and the geometry of the post supports. Comparison with experiments is made. This study is relevant to the designing of efficient convolvers which minimize the scattering due to the presence of a post-support structure. Copyright © 1979 by The Institute of Electrical and Electronics Engineers, Inc.
引用
收藏
页码:45 / 53
页数:9
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