CHARACTERIZATION OF AN IMPROVED DC PLASMA EXCITATION SOURCE

被引:20
作者
COLEMAN, GN
BRAUN, WP
ALLEN, AM
机构
关键词
D O I
10.1366/0003702804730934
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:24 / 30
页数:7
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