NATURE OF VICINAL LASER-ANNEALED SI(111) SURFACES

被引：32

作者：

CHABAL, YJ

ROWE, JE

CHRISTMAN, SB

机构：

来源：

PHYSICAL REVIEW B | 1981年 / 24卷 / 06期

关键词：

D O I：

10.1103/PhysRevB.24.3303

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：3303 / 3309

页数：7

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