THE THERMAL-STABILITY OF THIN-LAYER TRANSITION AND REFRACTORY METALLIZATIONS ON GAAS

被引：35

作者：

MUKHERJEE, SD

PALMSTRON, CJ

SMITH, JG

机构：

[1] UNIV LEEDS,DEPT ELECT & ELECTR ENGN,LEEDS LS2 9JT,W YORKSHIRE,ENGLAND

[2] ROYAL SIGNALS & RADAR ESTAB,BALDOCK SG7 6NG,HERTFORDSHIRE,ENGLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 05期

关键词：

D O I：

10.1116/1.570614

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：904 / 910

页数：7

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