ENHANCED ELIMINATION OF IMPLANTATION DAMAGE UPON EXCEEDING THE SOLID SOLUBILITY

被引：34

作者：

JONES, KS

PRUSSIN, S

WEBER, ER

机构：

[1] TRW,ELECTR GRP,REDONDO BEACH,CA 90278

[2] UNIV CALIF BERKELEY,DEPT MAT SCI & MINERAL ENGN,BERKELEY,CA 94720

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 10期

关键词：

D O I：

10.1063/1.339126

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4114 / 4117

页数：4

共 20 条

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[4]

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[6]

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[7]

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[8]

MICHEL AE, 1986, P MATER RES SOC, V52, P3

[9]

MIZUO S, 1985, MAT RES SOC S P, V36, P125

[10]

Murray J, 1984, B ALLOY PHASE DIAGR, V5, P74, DOI DOI 10.1007/BF02868729

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