PLASMA-ETCHING OF ALPHA-SIALON CERAMICS

被引：17
作者：
MITOMO, M
SATO, Y
AYUZAWA, N
YASHIMA, I
机构：
[1] SHINAGAWA REFRACTORIES CO,NEW MAT RES CTR,BIZEN,OKAYAMA 705,JAPAN
[2] MITSUI MIN CO,CTR CENT RES & DEV,KOUMACHI,TOCHIGI 328,JAPAN
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 04期
关键词：
PLASMA; ETCHING; SIALON; SILICON NITRIDE; MICROSTRUCTURE;
D O I：
10.1111/j.1151-2916.1991.tb06940.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Plasma etching of beta-Si3N4, alpha-sialon/beta-Si3N4 and alpha-sialon ceramics were performed with hydrogen glow plasma at 600-degrees-C for 10 h. The preferential etching of beta-Si3N4 grains was observed. The etching rate of alpha-sialon grains and of the grain-boundary glassy phase was distinctly lower than that of beta-Si3N4 grains. The size, shape, and distribution of beta-Si3N4 grains in the alpha-sialon/beta-Si3N4 composite ceramics were revealed by the present method.
引用
收藏
页码：856 / 858
页数：3
相关论文
共 50 条
[31]   CEramics based on α-sialon [J].
B. P. Paranosenkov ;
O. P. Podvigina ;
I. L. Shkarupa ;
A. P. Sosulina ;
V. M. Yudin .
Refractories and Industrial Ceramics, 1998, 39 :198-200
[32]   Characteristic of (Dy plus Sm)-Sialon ceramics [J].
Zhang, C ;
Sun, WY ;
Yan, DS .
SCIENCE OF ENGINEERING CERAMICS II, 1999, 2 :239-242
[33]   Tailoring the microstructures of SiAlON ceramics by manipulating the kinetics [J].
Shen, ZJ ;
Nygren, M .
SIAIONS, 2003, 237 :149-156
[34]   Microstructure control of α-Sialon ceramics by seeding with α-Sialon particles [J].
Qing-Wei Huang ;
Pei-Ling Wang ;
Yi-Bing Cheng ;
Dong-Sheng Yan .
Journal of Materials Science, 2002, 37 :3285-3290
[35]   PLASMA-ETCHING OF TEM SAMPLES FOR OBSERVING GRAIN-BOUNDARIES IN SILICON-NITRIDE [J].
SUEMATSU, H ;
BANDO, Y ;
MITOMO, M .
JOURNAL OF ELECTRON MICROSCOPY, 1995, 44 (03) :159-164
[36]   α→β sialon transformation in calcium-containing α-SiAlON ceramics [J].
Mandal, H ;
Thompson, DP .
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 1999, 19 (05) :543-552
[37]   HOT HARDNESS BEHAVIOR OF YTTRIUM SIALON CERAMICS [J].
EKSTROM, T ;
PERSSON, J .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (10) :2834-2838
[38]   CRYSTALLIZATION OF GRAIN-BOUNDARY PHASES IN SILICON-NITRIDE AND SIALON CERAMICS [J].
LEWIS, MH .
SILICON NITRIDE 93, 1994, 89-9 :333-337
[39]   A comparative study of silicon nitride and SiAlON ceramics against E. coli [J].
Akin, Seniz R. Kushan ;
Garcia, Caterina Bartomeu ;
Webster, Thomas J. .
CERAMICS INTERNATIONAL, 2021, 47 (02) :1837-1843
[40]   Dielectric properties of SiAlON ceramics [J].
Kim, Do Kyung ;
Kim, Ha Neul ;
Seong, Young-Hoon ;
Baek, Seung-Soo ;
Kang, Eul-Son ;
Baek, Yong-Gi .
SIAIONS AND NON-OXIDES, 2009, 403 :125-+
12345