INSITU GROWTH OF SUPERCONDUCTING BI-SR-CA-CU-O THIN-FILMS BY A HIGH-PRESSURE SPUTTERING PROCESS

被引:8
|
作者
PRIETO, P
GOMEZ, ME
CASTRO, LF
SOLTNER, H
POPPE, U
SYBERTZ, W
LUBIG, A
机构
[1] FORSCHUNGSZENTRUM JULICH, INST SCHICHT & IONENTECH, W-5170 JULICH 1, GERMANY
[2] FORSCHUNGSZENTRUM JULICH, INST FESTKORPERFORSCH, W-5170 JULICH, GERMANY
关键词
D O I
10.1016/0039-6028(91)91084-B
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
High quality superconducting Bi-Sr-Ca-Cu-O thin films have successfully been prepared in situ on MgO(100) and SrTiO3(100), substrates using a high oxygen pressure (3-4 mbar) DC sputtering system. We used Bi2Sr2Ca1Cu2O(x) and Bi1.7Pb0.3Sr2Ca2Cu3.6O(x) single targets. The as-sputtered films showed a high degree of c-axis orientation on MgO substrates and an epitaxial growth on SrTiO3 substrates. Without any post-annealing treatment the main composition of the films corresponded to the 2212 phase with a T(c onset) of 85 K. The films were characterized by X-ray diffraction, SEM, EDX and RBS analysis.
引用
收藏
页码:712 / 716
页数:5
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