3-LAYER OPTICAL-WAVEGUIDE FOR PHOTOLITHOGRAPHIC FABRICATION OF THIN-FILM LENSES

被引：1

作者：

AAGARD, RL ^{[1
]}

机构：

[1] HONEYWELL INC,RES CTR,BLOOMINGTON,MN 55420

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1977年 / 14卷 / 01期

关键词：

D O I：

10.1116/1.569138

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：275 / 277

页数：3

共 50 条

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